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Functional Films
Large-area interferometric lithography is available for moth-eye, microlens, and light-diffusing structures for R&D molds with a maximum area of 42 inches.
In addition, we can also provide customized structures based on optical design or customer's request for large.
Specifications
- Master Material
- Photoresist
- Structure Size
- 200nm～1mm
- Height of structure
- 100nm to 100μm
- Area
- Max 760mm x 570mm
*The maximum size varies depending on the structure. - Material
- Nickel (Ni)
InnoX offers design solutions for conceptual design, prototyping and evaluation through partnerships with European optical design experts and top Japanese universities.
The development of the manufacturing method has made it possible to fabricate molds with structures designed at the micro level. We can handle a wide range of designs from spherical to aspherical shapes, including microlens arrays and lenticular lenses.
We can also provide support for pattern design, such as the design of random pattern distributions, so please feel free to contact us.
Specifications
- Master Material
- Photoresist
- Machining accuracy
- 0.5μm
- Structure Size
- 0.8μm to 1mm
- Height of structure
- 1μm to 50μm
- Area
- Max 120mm x 120mm
*The maximum size varies depending on the structure. - Material
- Nickel, Photoresist, Resin
Machining example: Line and Space
In the case of line and space structures, it is possible to fabricate concavoconvex structures as small as 0.8µm.In the case of complex shapes such as lenses, finer resolution can be achieved.
1) Line/space = 0.8µm/0.8µm
2) Line/space = 1.6µm/1.6µm
3) Line/space = 3.2µm/3.2µm
4) Line/space = 10µm/10µm
Machining example: Dot pattern
1) 0.6µm 2) 0.8µm 3) 1.0µm
Machining example: Micro Lens Array
A full-pack microlens array without a bottom surface can be reproduced with high accuracy. The shape of the lens can be designed as desired, and can be triangular, square, hexagonal, or random.
Square MLA
Design example: Micro Lens Array
A full-pack microlens array without a bottom surface can be reproduced with high accuracy. The shape of the lens can be designed as desired, and can be triangular, square, hexagonal, or random.
1) Example of lens shape design
Square array
Hexagon array
2) Example of lens shape design: Random
It is also possible to control the distribution of randomness.
